On-chip erbium-doped lithium niobate waveguide amplifiers [Invited]

Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers amplifiers. Here, we report the fabrication erbium-doped LNOI waveguide amplifiers based electron beam lithography inductively coupled plasma reactive ion etching. A net internal gain ~30 dB/cm in communication band was achieved fabricated under pump a 974-nm continuous laser. This work develops new will promote development integrated photonics.